Non-contact conveyance developed in our company "FLOAT CHUCK" (patent) By jetting gas, a work of a semi-wafer,a glass board of FPD. etc. is conveyed non-contactingly and reversal, inclination are possible. [ which floated in the air ] Without having the structure where a shock to a work is not given by the jet air current, and also damaging a thin work and a weak work, a gas jet mechanism does not generate partial stress and does not make a work produce stress.
GREETING
Use in a super-clean room is also possible by the exhaust mechanism.
It corresponds to a semiconductor wafer,a glass substrate of LCD,PDP, a printed circuit board, a ceramic board, a through hole flexible board, a film, paper, a nonwoven fabric, a super shin work, a breathability work, etc.
We product Non-contact conveyance"FLOAT CHUCK" and many non-contact conveying equipments useing "FLOAT CHUCK", for example ,a non-contacting conveyance system for semi-wafer,glass substrates,printed circuits,films,sheet,paper,nonwoven fabric, ceramic board etc.
President
H.Akashi
