NON-contact Conveyance Equipment "Bernoulli Chuck",
By jetting air, attracts and susupends wafer,glass substrate and conveys non-contactedly.
Solar Research Raboratory Ltd. invented and I developed.

Solar Research Raboratory Ltd.
2-7-12 Kita-Sakuraduka Toyonaka-city Osaka Japan　560-0022　　
Phone　+81-6-6852-3876

Inquary

1	Float Chuck Type SA-C(SAN)
２	Float Chuck Type WA-C 　　（For clean room)
3	Float Chuck Type LNA 　　　(Ultra thin glass plate & fims）
４	Bernoulli chuck for high temperature wafers　　 （CVD　susceptor
５	Bernoulli chuck for glass substrate （glass plate）
6	Bernoulli chuck for lenses
7	Bernoulli chuck for small chips
8	Non-contact Tweezers （For wafer,chips,glass,lenses,ball)）

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Main Products of Solar Research Laboratory　
Bernoulli Chuck(Float　Chuck)
Non-Contact　Conveying Equipment