Metal mesh film,Ultra thin film, a film, 50 μm thickness glass, 25 μm thickness
wafer,a flexible printed circuit board, nonwoven fabric、 a through hole
board are not damaged, but it conveys by un-contacting
| Float chuck type |
Diameter (mm) |
Height (mm) |
| LNA-1 type |
phi 30 |
23 |
| LNA-2 type |
phi 50 |
30 |
| LNA-3 type |
phi 70 |
33 |
Bernoulli Chuck"The "Float Chuck Type LNA " has the function
which carries out the work in the state of un-contacting by jetting air
by making the inside into negative pressure caused by the ejector effect
and the Bernouilli effect according to distance with the work (for example
0.05mm ultra thin glass), and making it positive pressure according to
the air cushion effect of the pressure room and the cushion effect of an
air flow.
Bernoulli Chuck "Float Chuck Type LNA " has formed the air flow deviation tool directly under the air jet nozzle.
By the air flow deviation tool, the right-angled direction of the high-pressure
air blow off from the nozzle is changed, it does not collide directly the
work, and does not damage the work. Therefore, as shown in a pressure diagram,
partial stress with high-pressure jet air is not given to the work...
For this reason, the ultra thin glass and a weak work are not damaged,
either.
Moreover, conveyance are possible for breathability works, such as a nonwoven
fabric, paper, and cloth, a through-hole board, etc.
◎ Adaptation
1. Ultra thin glass (30 μm in Thickness)
2. Urutra thin Wafer (20 μm in Thickness)
3. Metal mesh films
4. Film (10 μm in Thickness)
5. Breathability Sheet (Others [ Cloth / Nonwoven Fabric, Paper, and ])
6. Throughhole Board
7. Solar Cell Wafer
8. Sapphire Wafer
