New Mechanism:The new type Bernoulli Chuck "Float Chuck Type SA-C (SAN)" adopts The Vertical Gas Flow System(VGFS).
In The Vertical Gas Flow System(VGFS),By making a cushion room carry out the vertical gas jet flow of the gas style spouted from the nozzle, the gas vertical jet gas flow decreases friction loss of the gas flow of the cushion room.
SRL Non-Contact Chuck.
The Vertical Gas Flow System(VGFSystem)
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1
  Float Chuck Type SA-C(SAN)
 ２  　Float Chuck Type WA-C
　　（For clean room)
 3  Float Chuck Type LNA
　　　(Ultra thin glass plate & fims）
４   Bernoulli chuck for high temperature wafers　　
（CVD　susceptor
５   Bernoulli chuck for glass substrate
（glass plate）
 6
 Bernoulli chuck for lenses
 7
  Bernoulli chuck for small chips
 8
  Non-contact Tweezers
（For wafer,chips,glass,lenses,ball)）
2-7-12 Kita-Sakuraduka Toyonaka-city Osaka Japan　560-0022　
Phone +81-6-6852-3876
Inquiry
Solar Research Laboratory Ltd.






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