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「 Non-contact conveying equipment for Ultra thin glass & Ultra thin films」
Bernoulli Chuck for Ultra thin glass & Ultra thin films(Pat.)SOLAR RESEARCH LABORATORY Ltd．
2-7-12 Kitasakuraduka Toyonaka-city Osaka Japan 560-0022Non-contact conveying equipment for Ultra thin glass
1.Ultra thin glass(２５ μm thickness）
2.Ultra thin film(5μm thickness)
3.SEM Wafer(25 μm thickness)
4.optical film
5.weak sheet
6. breathability sheet
◎FLOAT CHUCK Type LNAS-C (Pat.)
"FLOAT CHUCK type LNAS-C " has the function which carries out holding glass in the state of un-contacting by making air blow off by making the inside into negative pressure according to the ejector effect and the Bernouilli effect according to distance with the glassk, and making it positive pressure according to the effect of the pressure room and the cushion effect of an air flow.
In "FLOAT CHUCK Type LNAS-C ", since the high-pressure air spouts more horizontally from the nozzle of the nozzle pipe prepared in the central part at the cushion room which carried out the opening, high-pressure air does not collide with the glass directly. Moreover, partial stress with high-pressure jet air is not given to the glass. Furthermore, pressure balansing pipe (Pat.) which does not produce negative pressure in lower part at nozzle pipe of the "FLOAT CHUCK Type LNAS-C." Therefore, without being generated, with ultra thin flexible glass, curvature arises and negative pressure does not contact on the nozzle pipe undersurface, either.
|
Type |
Dia.(mm) |
Hight(mm) |
|
LNAS-1C |
40 |
20 |
|
LNAS-２C |
50 |
20 |
|
LNAS-３C |
70 |
20 |
| LNAS-4C | 95 | 25 |
PERFORMANCE
ADAPTATION
DIMENSION
