Bernoulli Chuck made by Solar Research Laboratory Ltd.
5.Non-Contact Conveying Equipment
(PAT)
FLOAT CHUCK Type LN
( adhesive film>)
The non-contact conveyance equipment "Bernoulli Chuck" (Float
Chuck ) which holds a work, and conveys and handles a conveyance object
for it by un-contacting is manufactured as a base by generating negative
pressure according to the Bernouilli effect, the ejector effect, and the coanda effect, and generating positive pressure according to air-cushion room ( the hovercraft effect)
.
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Non-contact tweezers for wfer chips
(5mmx5mm wafer chip)
4.Non-Contact Tweezers(Wafer,glass,lenses,wafer chips,Solar cell)
3.FLOAT CHUCK(Micro Wafer chip,Micro lenses,HDD Slider,glass)
FLOAT CHUCK Type CHO
(20μm thickness Wafer
Float Chuck Type WA
for crean room
wafer, LCD glass substrate
Float Chuck Type WA
for crean room
sapphire wafe,