SRL:VGFS Bernoulli Chuck

New Mechanism :The new type Bernoulli Chuck Float Chuck Type SA-C (SAN)" adopts The Vertical Gas Flow System(VGFS).
In The Vertical Gas Flow System(VGFS),By making a cushion room carry out the vertical gas jet flow of the gas style spouted from the nozzle, the gas vertical jet gas flow decreases friction loss of the gas flow of the cushion room.
The Non-contact transfer equipment"Float Chuck Type SA-C (SAN)" has three new technologies which are Bernoulli effect,Ejector effect and Coanda effect.
They increase the effect of negative pressure generating, and making holding capability increase conventionally more sharply than type, and its maintenance stability former power was strong against increase and the shock, and it reduced the amount of gas consumption by half mostly.

◎Non-contacting conveyance "Float Chuck Type SA-C (SAN) type"
By jetting gas toward a work-piece(wafer,glass substrate,film etc.) suction force of the non-contacting conveyance equipment "The Float Chuck Type SA-C (SAN)" (Fig. 1) can be carried out in the state of non-contacting [ which floated in the air ], and it can convey the work.

When the gap of an operation face and a work is large, the gap of a gas jet part nozzle, a cushion room and an operation face, and a work achieves the function of the nozzle of a ejector, a vacuum room, and a diffuser, respectively. Therefore, the negative pressure will arise in a cushion room and a work will be drawn near. When a work can draw near and a gap with an operation face becomes small, as for a cushion room, the function of a pressure room type air cushion (hovercraft) is achieved, and the pressure of a cushion room rises rapidly and pulls apart a work. In the distance which holds automatically the distance of the operation face and work which maintain the pressure with which this cushion room was balanced, the work is carried out in the state of un-contacting [ which floated in the air ].

Large high load and amount of low-altitude gas consumption are realized.

	SA-1C (SAN) Type	SA-2C (SAN) Type	SA-3C (SAN) Type	SA-4C (SAN) Type	SA-5C (SAN) Type	SA-6C (SAN) Type
φDmm	39	49	69	95	105	120
tmm	25	20	20	25	25	25
Pipe joint	M5	M5	M5	R1/8	R1/8	R1/8

The non-contacting conveyance equipment "Float Chuck Type SA-C (SAN)" -- As the negative pressure generating mechanism.
When an operation side and a work is small, it has negative pressure generating by the Bernouilli effect by the high-speed gas current which flows a gap, and the cushion effect by the high-speed air current which passes through the above-mentioned gap as a rising pressure generating function The above-mentioned efficiency.

Since it has the effective generate the negative pressure action and the ascending pressure action, number one's high load and amount of low-altitude gas consumption have been realized.