Non-Contact Transfer Equipment , Bernouilli Chuck

The non-contacting suction mechanism of "５０μm ultra-thin glass non-contacting conveyance equipment" consists of non-contacting conveyance equipment "Ｆloat Chuck Type LNA ."
"The Float Chuck Type LNA " has the function which carries out 50μmｔ ultra thin glass in the state of un-contacting by jetting air by making the inside into negative pressure according to the ejector effect and the Bernouilli effect according to distance with 50μm ultra thin glass, and making it positive pressure according to the air cushion effect of the pressure room and the cushion effect of an air flow.

　

Ultra-thin glass substrate non-contacting conveyance equipment

The "Float Chuck Type LNA " has formed the air flow deviation tool directly under the air jet nozzle.
By a gas deviation tool, the right-angled direction of the high-pressure air blow off from the nozzle is changed, it does not collide directly the ultra thin glassk, and does not damage the ultra thin glass. Therefore, as shown in a pressure diagram, partial stress with high-pressure jet air is not given to the ultra thin glass..
For this reason, the ultra thin glass and a weak work are not damaged, either.
Moreover, "Float Chuck Type LNA can transfer breathability works, such as a nonwoven fabric, paper, and cloth, a through-hole board, etc.

◎ Adaptation
1. Ultra　thin Glass (30μm )
2. Super-thin Wafer (20μm）　
3. Ceramic　Green Sheet
4. Film (10 Micrometers in Thickness)
5. Breathability Sheet (Others [ Cloth / Nonwoven Fabric, Paper, and ])
6. Through Hole Board
7. Solar Cell Wafer
8. Sapphire Wafer