Home Page Profile Product Delivery Result Contact Us  New Product
Non-contact Robot Hand for Si ,Sapphire wafer
「Non-Contact Robot End Effector for Wafer」(PAT)
　　　　　　　　　Type　 Ｌmm Wmm Tmm Weight ｇ Wafer
FTU-1 １４０ ４０ ３．２ １５０ ３ｉｎ
FTU-2 １７０ ４０ ３．２ １７０ ４ｉｎ
FTU-3 ２２０ ６０ ３．２ ２２０ ６ｉｎ


Solar Research Laboratory Ltd.
Product
Delivery Result
1-3-1Choukouji-Minami1-3-1,ToyonakaCity,
Osaka,561-0874 　　　　　　　Japan
Tel 06-6862-6555　Fax 06-6862-6556
E-Mail:info@solarlab.co.jp
URL　http://www.solarlab.co.jp/hp3eng
「Non-Contact Robot End Effector for Wafer」(PAT)(Bernoulli Chuck) works on the combination of suction force by decreasing static pressure in ejector and Bernouilli function, and repupulsion force by increasing pressure in pressureroom of air cusion function. It picks up,suspends and holds Si,Sapphire Wafer. 　
　「Non-Contact Robot End Effector for Wafer」 have few amounts of gas consumption, and hanginng weight is high efficiency. Since it is made thinly . it is the the best for loader & unloder from the wafer career.
　　Moreover, since the positioning mechanism is attached, the wafer by which alignment was carried out can be conveyed.　
REF　URL　http://www.solarlab.co.jp/ftp
1. Non-contact Convey Equitment
2. IT is possible to lode & unlode to wafer career
3.It is made extrely thin.



◎Feature